Process Design – Case Study 2

HAZARDOUS GAS SYSTEM

• Engineered hazardous and flammable gas distribution for the semiconductor facility
• Custom-designed gas cabinets and valve manifold boxes, including detailed P&IDs (piping and instrumentation diagrams) and tubing details
• Specified and designed TGM (toxic gas monitoring) safety systems for hazardous gas detection, alarm, and automatic fail-safe shutdown
• Provided detailed construction drawings for double wall monitored coaxial tubing for hazardous gases