Cleanroom Projects
Semiconductor Cleanroom Design
- $50 million, ISO 5 semiconductor cleanroom with 23-foot ceiling
- Designed and coordinated mechanical systems delivering over 200,000 CFM of air and 2.5 mega-watt of process cooling water
- Tight environmental tolerances including +/-1 F and +/-2.5 %Rh
- Coordinated all HVAC, process, and electrical utilities for semiconductor equipment